Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications
Abstract Flexible surface acoustic wave (SAW) devices have recently attracted tremendous attention for their widespread application in sensing and microfluidics. However, for these applications, SAW devices often need to be bent into off-axis deformations between the acoustic wave propagation direct...
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Main Authors: | Zhangbin Ji, Jian Zhou, Huamao Lin, Jianhui Wu, Dinghong Zhang, Sean Garner, Alex Gu, Shurong Dong, YongQing Fu, Huigao Duan |
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Format: | article |
Language: | EN |
Published: |
Nature Publishing Group
2021
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Online Access: | https://doaj.org/article/e03fd7dfb84a41b59c9bc6538f720933 |
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