Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport
An aluminum nitride (AlN) Schottky barrier diode (SBD) was fabricated on a nonpolar AlN crystal grown on tungsten substrate by physical vapor transport. The Ni/Au–AlN SBD features a low ideality factor <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math&g...
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oai:doaj.org-article:e09472d1c1f04b05af3b537c7db7e3312021-11-19T00:01:16ZBarrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport2168-673410.1109/JEDS.2019.2923204https://doaj.org/article/e09472d1c1f04b05af3b537c7db7e3312019-01-01T00:00:00Zhttps://ieeexplore.ieee.org/document/8737747/https://doaj.org/toc/2168-6734An aluminum nitride (AlN) Schottky barrier diode (SBD) was fabricated on a nonpolar AlN crystal grown on tungsten substrate by physical vapor transport. The Ni/Au–AlN SBD features a low ideality factor <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> of 3.3 and an effective Schottky barrier height (SBH) of 1.05 eV at room temperature. The ideality factor <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> decreases and the effective SBH increases at high temperatures. The temperature dependences of <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> and SBH were explained using an inhomogeneous model. A mean SBH of 2.105 eV was obtained for the Ni–AlN Schottky junction from the inhomogeneity analysis of the current–voltage characteristics. An equation in which the parameters have explicit physical meanings in thermionic emission theory is proposed to describe the current–voltage characteristics of inhomogeneous SBDs.Qin ZhouHonglei WuHui LiXi TangZuoyan QinDan DongYan LinChengjin LuRan QiuRuisheng ZhengJiannong WangBaikui LiIEEEarticleAlNnon-polarSchottky barrier diodeinhomogeneitythermionic emissionphysical vapor transportElectrical engineering. Electronics. Nuclear engineeringTK1-9971ENIEEE Journal of the Electron Devices Society, Vol 7, Pp 662-667 (2019) |
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AlN non-polar Schottky barrier diode inhomogeneity thermionic emission physical vapor transport Electrical engineering. Electronics. Nuclear engineering TK1-9971 |
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AlN non-polar Schottky barrier diode inhomogeneity thermionic emission physical vapor transport Electrical engineering. Electronics. Nuclear engineering TK1-9971 Qin Zhou Honglei Wu Hui Li Xi Tang Zuoyan Qin Dan Dong Yan Lin Chengjin Lu Ran Qiu Ruisheng Zheng Jiannong Wang Baikui Li Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport |
description |
An aluminum nitride (AlN) Schottky barrier diode (SBD) was fabricated on a nonpolar AlN crystal grown on tungsten substrate by physical vapor transport. The Ni/Au–AlN SBD features a low ideality factor <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> of 3.3 and an effective Schottky barrier height (SBH) of 1.05 eV at room temperature. The ideality factor <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> decreases and the effective SBH increases at high temperatures. The temperature dependences of <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> and SBH were explained using an inhomogeneous model. A mean SBH of 2.105 eV was obtained for the Ni–AlN Schottky junction from the inhomogeneity analysis of the current–voltage characteristics. An equation in which the parameters have explicit physical meanings in thermionic emission theory is proposed to describe the current–voltage characteristics of inhomogeneous SBDs. |
format |
article |
author |
Qin Zhou Honglei Wu Hui Li Xi Tang Zuoyan Qin Dan Dong Yan Lin Chengjin Lu Ran Qiu Ruisheng Zheng Jiannong Wang Baikui Li |
author_facet |
Qin Zhou Honglei Wu Hui Li Xi Tang Zuoyan Qin Dan Dong Yan Lin Chengjin Lu Ran Qiu Ruisheng Zheng Jiannong Wang Baikui Li |
author_sort |
Qin Zhou |
title |
Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport |
title_short |
Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport |
title_full |
Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport |
title_fullStr |
Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport |
title_full_unstemmed |
Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport |
title_sort |
barrier inhomogeneity of schottky diode on nonpolar aln grown by physical vapor transport |
publisher |
IEEE |
publishDate |
2019 |
url |
https://doaj.org/article/e09472d1c1f04b05af3b537c7db7e331 |
work_keys_str_mv |
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