Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport

An aluminum nitride (AlN) Schottky barrier diode (SBD) was fabricated on a nonpolar AlN crystal grown on tungsten substrate by physical vapor transport. The Ni/Au&#x2013;AlN SBD features a low ideality factor <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math&g...

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Autores principales: Qin Zhou, Honglei Wu, Hui Li, Xi Tang, Zuoyan Qin, Dan Dong, Yan Lin, Chengjin Lu, Ran Qiu, Ruisheng Zheng, Jiannong Wang, Baikui Li
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Lenguaje:EN
Publicado: IEEE 2019
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spelling oai:doaj.org-article:e09472d1c1f04b05af3b537c7db7e3312021-11-19T00:01:16ZBarrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport2168-673410.1109/JEDS.2019.2923204https://doaj.org/article/e09472d1c1f04b05af3b537c7db7e3312019-01-01T00:00:00Zhttps://ieeexplore.ieee.org/document/8737747/https://doaj.org/toc/2168-6734An aluminum nitride (AlN) Schottky barrier diode (SBD) was fabricated on a nonpolar AlN crystal grown on tungsten substrate by physical vapor transport. The Ni/Au&#x2013;AlN SBD features a low ideality factor <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> of 3.3 and an effective Schottky barrier height (SBH) of 1.05 eV at room temperature. The ideality factor <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> decreases and the effective SBH increases at high temperatures. The temperature dependences of <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> and SBH were explained using an inhomogeneous model. A mean SBH of 2.105 eV was obtained for the Ni&#x2013;AlN Schottky junction from the inhomogeneity analysis of the current&#x2013;voltage characteristics. An equation in which the parameters have explicit physical meanings in thermionic emission theory is proposed to describe the current&#x2013;voltage characteristics of inhomogeneous SBDs.Qin ZhouHonglei WuHui LiXi TangZuoyan QinDan DongYan LinChengjin LuRan QiuRuisheng ZhengJiannong WangBaikui LiIEEEarticleAlNnon-polarSchottky barrier diodeinhomogeneitythermionic emissionphysical vapor transportElectrical engineering. Electronics. Nuclear engineeringTK1-9971ENIEEE Journal of the Electron Devices Society, Vol 7, Pp 662-667 (2019)
institution DOAJ
collection DOAJ
language EN
topic AlN
non-polar
Schottky barrier diode
inhomogeneity
thermionic emission
physical vapor transport
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
spellingShingle AlN
non-polar
Schottky barrier diode
inhomogeneity
thermionic emission
physical vapor transport
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
Qin Zhou
Honglei Wu
Hui Li
Xi Tang
Zuoyan Qin
Dan Dong
Yan Lin
Chengjin Lu
Ran Qiu
Ruisheng Zheng
Jiannong Wang
Baikui Li
Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport
description An aluminum nitride (AlN) Schottky barrier diode (SBD) was fabricated on a nonpolar AlN crystal grown on tungsten substrate by physical vapor transport. The Ni/Au&#x2013;AlN SBD features a low ideality factor <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> of 3.3 and an effective Schottky barrier height (SBH) of 1.05 eV at room temperature. The ideality factor <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> decreases and the effective SBH increases at high temperatures. The temperature dependences of <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula> and SBH were explained using an inhomogeneous model. A mean SBH of 2.105 eV was obtained for the Ni&#x2013;AlN Schottky junction from the inhomogeneity analysis of the current&#x2013;voltage characteristics. An equation in which the parameters have explicit physical meanings in thermionic emission theory is proposed to describe the current&#x2013;voltage characteristics of inhomogeneous SBDs.
format article
author Qin Zhou
Honglei Wu
Hui Li
Xi Tang
Zuoyan Qin
Dan Dong
Yan Lin
Chengjin Lu
Ran Qiu
Ruisheng Zheng
Jiannong Wang
Baikui Li
author_facet Qin Zhou
Honglei Wu
Hui Li
Xi Tang
Zuoyan Qin
Dan Dong
Yan Lin
Chengjin Lu
Ran Qiu
Ruisheng Zheng
Jiannong Wang
Baikui Li
author_sort Qin Zhou
title Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport
title_short Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport
title_full Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport
title_fullStr Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport
title_full_unstemmed Barrier Inhomogeneity of Schottky Diode on Nonpolar AlN Grown by Physical Vapor Transport
title_sort barrier inhomogeneity of schottky diode on nonpolar aln grown by physical vapor transport
publisher IEEE
publishDate 2019
url https://doaj.org/article/e09472d1c1f04b05af3b537c7db7e331
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