Progress of optomechanical micro/nano sensors: a review

Optomechanical sensing based on the coupling between mechanical motions and optical resonances has attracted huge interest in sensor applications due to its small footprint, high sensitivity, low detection limit, and electromagnetic immunity. Optomechanical sensors that detect from mechanical motion...

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Auteurs principaux: Xinmiao Liu, Weixin Liu, Zhihao Ren, Yiming Ma, Bowei Dong, Guangya Zhou, Chengkuo Lee
Format: article
Langue:EN
Publié: Taylor & Francis Group 2021
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Accès en ligne:https://doaj.org/article/e70d65a5d20d4905b42712efb2f7d7be
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