Liu, J., Huang, Z., Conway, P. P., & Liu, Y. (2019). Processing-Structure-Protrusion Relationship of 3-D Cu TSVs: Control at the Atomic Scale. IEEE.
Cita Chicago Style (17a ed.)Liu, Jinxin, Zhiheng Huang, Paul P. Conway, y Yang Liu. Processing-Structure-Protrusion Relationship of 3-D Cu TSVs: Control at the Atomic Scale. IEEE, 2019.
Cita MLA (8a ed.)Liu, Jinxin, et al. Processing-Structure-Protrusion Relationship of 3-D Cu TSVs: Control at the Atomic Scale. IEEE, 2019.
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