Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering

In the past few decades, ZrN thin films have been identified as wear resistant coatings for tribological applications. The mechanical and tribological properties of ZrN thin layers depend on internal stress induced by the adopted deposition techniques and deposition parameters such as pressure, temp...

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Autores principales: Anna Maria Laera, Marcello Massaro, Domenico Dimaio, Aleksandar Vencl, Antonella Rizzo
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/eaebde6fb083464a8f555d78e61fecf3
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