Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering

In the past few decades, ZrN thin films have been identified as wear resistant coatings for tribological applications. The mechanical and tribological properties of ZrN thin layers depend on internal stress induced by the adopted deposition techniques and deposition parameters such as pressure, temp...

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Autores principales:	Anna Maria Laera, Marcello Massaro, Domenico Dimaio, Aleksandar Vencl, Antonella Rizzo
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	dual magnetron sputtering ZrN coatings compressive residual stress tribological properties duty cycle Technology T Electrical engineering. Electronics. Nuclear engineering TK1-9971 Engineering (General). Civil engineering (General) TA1-2040 Microscopy QH201-278.5 Descriptive and experimental mechanics QC120-168.85
Acceso en línea:	https://doaj.org/article/eaebde6fb083464a8f555d78e61fecf3
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spelling	oai:doaj.org-article:eaebde6fb083464a8f555d78e61fecf32021-11-11T18:02:18ZResidual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering10.3390/ma142164621996-1944https://doaj.org/article/eaebde6fb083464a8f555d78e61fecf32021-10-01T00:00:00Zhttps://www.mdpi.com/1996-1944/14/21/6462https://doaj.org/toc/1996-1944In the past few decades, ZrN thin films have been identified as wear resistant coatings for tribological applications. The mechanical and tribological properties of ZrN thin layers depend on internal stress induced by the adopted deposition techniques and deposition parameters such as pressure, temperature, and growth rate. In sputtering deposition processes, the selected target voltage waveform and the plasma characteristics also play a crucial influence on physical properties of produced coatings. In present work, ZrN thin films, obtained setting different values of duty cycle in a reactive bipolar pulsed dual magnetron sputtering plant, were investigated to evaluate their residual stress through the substrate curvature method. A considerable progressive increase of residual stress values was measured at decreasing duty cycle, attesting the significant role of voltage waveform in stress development. An evident correlation was also highlighted between the values of the duty cycle and those of wear factor. The performed analysis attested an advantageous effect of internal stress, having the samples with high compressive stress, higher wear resistance. A downward trend for wear rate with the increase of internal residual stress was observed. The choice of suitable values of duty cycle allowed to produce ceramic coatings with improved tribological performance.Anna Maria LaeraMarcello MassaroDomenico DimaioAleksandar VenclAntonella RizzoMDPI AGarticledual magnetron sputteringZrN coatingscompressive residual stresstribological propertiesduty cycleTechnologyTElectrical engineering. Electronics. Nuclear engineeringTK1-9971Engineering (General). Civil engineering (General)TA1-2040MicroscopyQH201-278.5Descriptive and experimental mechanicsQC120-168.85ENMaterials, Vol 14, Iss 6462, p 6462 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	dual magnetron sputtering ZrN coatings compressive residual stress tribological properties duty cycle Technology T Electrical engineering. Electronics. Nuclear engineering TK1-9971 Engineering (General). Civil engineering (General) TA1-2040 Microscopy QH201-278.5 Descriptive and experimental mechanics QC120-168.85
spellingShingle	dual magnetron sputtering ZrN coatings compressive residual stress tribological properties duty cycle Technology T Electrical engineering. Electronics. Nuclear engineering TK1-9971 Engineering (General). Civil engineering (General) TA1-2040 Microscopy QH201-278.5 Descriptive and experimental mechanics QC120-168.85 Anna Maria Laera Marcello Massaro Domenico Dimaio Aleksandar Vencl Antonella Rizzo Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering
description	In the past few decades, ZrN thin films have been identified as wear resistant coatings for tribological applications. The mechanical and tribological properties of ZrN thin layers depend on internal stress induced by the adopted deposition techniques and deposition parameters such as pressure, temperature, and growth rate. In sputtering deposition processes, the selected target voltage waveform and the plasma characteristics also play a crucial influence on physical properties of produced coatings. In present work, ZrN thin films, obtained setting different values of duty cycle in a reactive bipolar pulsed dual magnetron sputtering plant, were investigated to evaluate their residual stress through the substrate curvature method. A considerable progressive increase of residual stress values was measured at decreasing duty cycle, attesting the significant role of voltage waveform in stress development. An evident correlation was also highlighted between the values of the duty cycle and those of wear factor. The performed analysis attested an advantageous effect of internal stress, having the samples with high compressive stress, higher wear resistance. A downward trend for wear rate with the increase of internal residual stress was observed. The choice of suitable values of duty cycle allowed to produce ceramic coatings with improved tribological performance.
format	article
author	Anna Maria Laera Marcello Massaro Domenico Dimaio Aleksandar Vencl Antonella Rizzo
author_facet	Anna Maria Laera Marcello Massaro Domenico Dimaio Aleksandar Vencl Antonella Rizzo
author_sort	Anna Maria Laera
title	Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering
title_short	Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering
title_full	Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering
title_fullStr	Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering
title_full_unstemmed	Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering
title_sort	residual stress and tribological performance of zrn coatings produced by reactive bipolar pulsed magnetron sputtering
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/eaebde6fb083464a8f555d78e61fecf3
work_keys_str_mv	AT annamarialaera residualstressandtribologicalperformanceofzrncoatingsproducedbyreactivebipolarpulsedmagnetronsputtering AT marcellomassaro residualstressandtribologicalperformanceofzrncoatingsproducedbyreactivebipolarpulsedmagnetronsputtering AT domenicodimaio residualstressandtribologicalperformanceofzrncoatingsproducedbyreactivebipolarpulsedmagnetronsputtering AT aleksandarvencl residualstressandtribologicalperformanceofzrncoatingsproducedbyreactivebipolarpulsedmagnetronsputtering AT antonellarizzo residualstressandtribologicalperformanceofzrncoatingsproducedbyreactivebipolarpulsedmagnetronsputtering
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Residual Stress and Tribological Performance of ZrN Coatings Produced by Reactive Bipolar Pulsed Magnetron Sputtering

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