Relative positioning control of flexible structure for precise positioning stage

Precise positioning technologies are widely used in industrial machines such as device manufacturing equipment. Many studies have been done on feedback control systems for precise positioning stages that improve accuracy by using sensor signal feedback. However, the sensor output does not always dir...

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Autores principales: Hironori OGAWA, Yukinori KOBAYASHI, Takanori EMARU
Formato: article
Lenguaje:EN
Publicado: The Japan Society of Mechanical Engineers 2020
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Acceso en línea:https://doaj.org/article/f2837d30d2d4430bb9f53d09a673bbbf
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