Relative positioning control of flexible structure for precise positioning stage

Precise positioning technologies are widely used in industrial machines such as device manufacturing equipment. Many studies have been done on feedback control systems for precise positioning stages that improve accuracy by using sensor signal feedback. However, the sensor output does not always dir...

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Autores principales:	Hironori OGAWA, Yukinori KOBAYASHI, Takanori EMARU
Formato:	article
Lenguaje:	EN
Publicado:	The Japan Society of Mechanical Engineers 2020
Materias:	positioning control relative positioning precise positioning stage flexible structure linear motor Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/f2837d30d2d4430bb9f53d09a673bbbf
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spelling	oai:doaj.org-article:f2837d30d2d4430bb9f53d09a673bbbf2021-11-29T05:53:24ZRelative positioning control of flexible structure for precise positioning stage2187-974510.1299/mej.19-00443https://doaj.org/article/f2837d30d2d4430bb9f53d09a673bbbf2020-02-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/mej/7/2/7_19-00443/_pdf/-char/enhttps://doaj.org/toc/2187-9745Precise positioning technologies are widely used in industrial machines such as device manufacturing equipment. Many studies have been done on feedback control systems for precise positioning stages that improve accuracy by using sensor signal feedback. However, the sensor output does not always directly indicate the performance of the industrial machines because the final requirement of a stage system is generally to adjust a movable stage to a target structure. Therefore, the relative displacement between the stage and the target structure must be controlled. However, the stage and other structures must be considered as elastic elements, especially for precise positioning devices. Thus, this study aims to achieve precise positioning in relative displacement between flexible structures. The authors previously proposed a relative displacement observer that estimated the relative displacement between the stage and the target structure by using only the stage displacement. In this paper, we propose additional control system for relative displacement by using self resonance cancellation technique. The positioning performance of the proposed system is evaluated in numerical simulation and experimental stage system. Results of numerical simulation and experiments show that the proposed control system improves the relative positioning performance.Hironori OGAWAYukinori KOBAYASHITakanori EMARUThe Japan Society of Mechanical Engineersarticlepositioning controlrelative positioningprecise positioning stageflexible structurelinear motorMechanical engineering and machineryTJ1-1570ENMechanical Engineering Journal, Vol 7, Iss 2, Pp 19-00443-19-00443 (2020)
institution	DOAJ
collection	DOAJ
language	EN
topic	positioning control relative positioning precise positioning stage flexible structure linear motor Mechanical engineering and machinery TJ1-1570
spellingShingle	positioning control relative positioning precise positioning stage flexible structure linear motor Mechanical engineering and machinery TJ1-1570 Hironori OGAWA Yukinori KOBAYASHI Takanori EMARU Relative positioning control of flexible structure for precise positioning stage
description	Precise positioning technologies are widely used in industrial machines such as device manufacturing equipment. Many studies have been done on feedback control systems for precise positioning stages that improve accuracy by using sensor signal feedback. However, the sensor output does not always directly indicate the performance of the industrial machines because the final requirement of a stage system is generally to adjust a movable stage to a target structure. Therefore, the relative displacement between the stage and the target structure must be controlled. However, the stage and other structures must be considered as elastic elements, especially for precise positioning devices. Thus, this study aims to achieve precise positioning in relative displacement between flexible structures. The authors previously proposed a relative displacement observer that estimated the relative displacement between the stage and the target structure by using only the stage displacement. In this paper, we propose additional control system for relative displacement by using self resonance cancellation technique. The positioning performance of the proposed system is evaluated in numerical simulation and experimental stage system. Results of numerical simulation and experiments show that the proposed control system improves the relative positioning performance.
format	article
author	Hironori OGAWA Yukinori KOBAYASHI Takanori EMARU
author_facet	Hironori OGAWA Yukinori KOBAYASHI Takanori EMARU
author_sort	Hironori OGAWA
title	Relative positioning control of flexible structure for precise positioning stage
title_short	Relative positioning control of flexible structure for precise positioning stage
title_full	Relative positioning control of flexible structure for precise positioning stage
title_fullStr	Relative positioning control of flexible structure for precise positioning stage
title_full_unstemmed	Relative positioning control of flexible structure for precise positioning stage
title_sort	relative positioning control of flexible structure for precise positioning stage
publisher	The Japan Society of Mechanical Engineers
publishDate	2020
url	https://doaj.org/article/f2837d30d2d4430bb9f53d09a673bbbf
work_keys_str_mv	AT hironoriogawa relativepositioningcontrolofflexiblestructureforprecisepositioningstage AT yukinorikobayashi relativepositioningcontrolofflexiblestructureforprecisepositioningstage AT takanoriemaru relativepositioningcontrolofflexiblestructureforprecisepositioningstage
_version_	1718407621871927296

Relative positioning control of flexible structure for precise positioning stage

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