Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers

Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers

Abstract The cleaning of two-dimensional (2D) materials is an essential step in the fabrication of future devices, leveraging their unique physical, optical, and chemical properties. Part of these emerging 2D materials are transition metal dichalcogenides (TMDs). So far there is limited understandin...

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Détails bibliographiques
Auteurs principaux: Daniil Marinov, Jean-François de Marneffe, Quentin Smets, Goutham Arutchelvan, Kristof M. Bal, Ekaterina Voronina, Tatyana Rakhimova, Yuri Mankelevich, Salim El Kazzi, Ankit Nalin Mehta, Pieter-Jan Wyndaele, Markus Hartmut Heyne, Jianran Zhang, Patrick C. With, Sreetama Banerjee, Erik C. Neyts, Inge Asselberghs, Dennis Lin, Stefan De Gendt
Format: article
Langue:EN
Publié: Nature Portfolio 2021
Sujets:
Materials of engineering and construction. Mechanics of materials
TA401-492
Chemistry
QD1-999
Accès en ligne:https://doaj.org/article/f7264bb1bbb04927a645eab375c746fc
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https://doaj.org/article/f7264bb1bbb04927a645eab375c746fc

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