Modeling of temperature regimes of thin film gas sensitive devices
This paper presents results of the modeling of the temperature distribution in a chip of thin film gas sensor, operating at high temperatures (150-1000o C), required to provide high sensitivity and selectivity to target gases. Analysis of thermal regimes of such chip was ca...
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| Format: | article |
| Langue: | EN |
| Publié: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2005
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| Accès en ligne: | https://doaj.org/article/fb19c84774b24ddd935db9b7b5046e30 |
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