Modeling of temperature regimes of thin film gas sensitive devices
This paper presents results of the modeling of the temperature distribution in a chip of thin film gas sensor, operating at high temperatures (150-1000o C), required to provide high sensitivity and selectivity to target gases. Analysis of thermal regimes of such chip was ca...
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| Autor principal: | |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2005
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/fb19c84774b24ddd935db9b7b5046e30 |
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| Sumario: | This paper presents results of the modeling of the temperature distribution in a chip of
thin film gas sensor, operating at high temperatures (150-1000o
C), required to provide high
sensitivity and selectivity to target gases. Analysis of thermal regimes of such chip was
carried out on the base of model of plate with local source of heat. It was found that substrate
heat conductivity is most influencing parameter, determining both temperature distribution in
chip and also the electrical power consumption decreasing. The example of realized chips
designed in accordance with results of modeling is presented. The results of modeling are
compared with experimental data. |
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