Modeling of temperature regimes of thin film gas sensitive devices

This paper presents results of the modeling of the temperature distribution in a chip of thin film gas sensor, operating at high temperatures (150-1000o C), required to provide high sensitivity and selectivity to target gases. Analysis of thermal regimes of such chip was ca...

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Bibliographic Details
Main Author: Dmitriev, Serghei
Format: article
Language:EN
Published: D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2005
Subjects:
Online Access:https://doaj.org/article/fb19c84774b24ddd935db9b7b5046e30
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