A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling
This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian process (GP) modelling. Multiple output responses of t...
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| Auteurs principaux: | , , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
MDPI AG
2021
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/fbddf3b1230e41ebbc9b2460ce959f04 |
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