EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMS

SnO2 and In2O3 thin films have been succesfully prepared by direct UV irradiation of amorphous films of b-diketonate complexes on Si(100) substrates. The as-deposited films were analyzed by Auger electron spectroscopy (AES), whereas annealing was required in order to get X-ray diffraction spectra, i...

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Auteurs principaux: BUONO-CORE,G.E., CABELLO,G., CAYON,JOSE LUIS, TEJOS,M., HILL,R.H.
Langue:English
Publié: Sociedad Chilena de Química 2005
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Accès en ligne:http://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0717-97072005000300003
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