EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMS

SnO2 and In2O3 thin films have been succesfully prepared by direct UV irradiation of amorphous films of b-diketonate complexes on Si(100) substrates. The as-deposited films were analyzed by Auger electron spectroscopy (AES), whereas annealing was required in order to get X-ray diffraction spectra, i...

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Autores principales:	BUONO-CORE,G.E., CABELLO,G., CAYON,JOSE LUIS, TEJOS,M., HILL,R.H.
Lenguaje:	English
Publicado:	Sociedad Chilena de Química 2005
Materias:	Indium oxide Tin oxide photodeposition metal b-diketonates thin films
Acceso en línea:	http://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0717-97072005000300003
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spelling	oai:scielo:S0717-970720050003000032005-11-23EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMSBUONO-CORE,G.E.CABELLO,G.CAYON,JOSE LUISTEJOS,M.HILL,R.H. Indium oxide Tin oxide photodeposition metal b-diketonates thin films SnO2 and In2O3 thin films have been succesfully prepared by direct UV irradiation of amorphous films of b-diketonate complexes on Si(100) substrates. The as-deposited films were analyzed by Auger electron spectroscopy (AES), whereas annealing was required in order to get X-ray diffraction spectra, indicating the amorphous nature of the films. The surface morphology of the films examined by Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) revealed that In2O3 films are much smoother than SnO2 films, with average surface roughness (Ra) of 3 nm and 11 nm respectively. The low resistivity values determined for these metal oxide films (3-4 x 10-4 W cm) demonstrate the potential use of these deposited films in gas-sensing devices for detection of environmentally significant concentrations of oxidizing species such as NO2 and O3info:eu-repo/semantics/openAccessSociedad Chilena de QuímicaJournal of the Chilean Chemical Society v.50 n.3 20052005-09-01text/htmlhttp://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0717-97072005000300003en10.4067/S0717-97072005000300003
institution	Scielo Chile
collection	Scielo Chile
language	English
topic	Indium oxide Tin oxide photodeposition metal b-diketonates thin films
spellingShingle	Indium oxide Tin oxide photodeposition metal b-diketonates thin films BUONO-CORE,G.E. CABELLO,G. CAYON,JOSE LUIS TEJOS,M. HILL,R.H. EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMS
description	SnO2 and In2O3 thin films have been succesfully prepared by direct UV irradiation of amorphous films of b-diketonate complexes on Si(100) substrates. The as-deposited films were analyzed by Auger electron spectroscopy (AES), whereas annealing was required in order to get X-ray diffraction spectra, indicating the amorphous nature of the films. The surface morphology of the films examined by Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) revealed that In2O3 films are much smoother than SnO2 films, with average surface roughness (Ra) of 3 nm and 11 nm respectively. The low resistivity values determined for these metal oxide films (3-4 x 10-4 W cm) demonstrate the potential use of these deposited films in gas-sensing devices for detection of environmentally significant concentrations of oxidizing species such as NO2 and O3
author	BUONO-CORE,G.E. CABELLO,G. CAYON,JOSE LUIS TEJOS,M. HILL,R.H.
author_facet	BUONO-CORE,G.E. CABELLO,G. CAYON,JOSE LUIS TEJOS,M. HILL,R.H.
author_sort	BUONO-CORE,G.E.
title	EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMS
title_short	EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMS
title_full	EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMS
title_fullStr	EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMS
title_full_unstemmed	EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMS
title_sort	evaluation of b-diketonate tin and indium complexes as precursors for the photodeposition of sno2 and in2o3 thin films
publisher	Sociedad Chilena de Química
publishDate	2005
url	http://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0717-97072005000300003
work_keys_str_mv	AT buonocorege evaluationofbdiketonatetinandindiumcomplexesasprecursorsforthephotodepositionofsno2andin2o3thinfilms AT cabellog evaluationofbdiketonatetinandindiumcomplexesasprecursorsforthephotodepositionofsno2andin2o3thinfilms AT cayonjoseluis evaluationofbdiketonatetinandindiumcomplexesasprecursorsforthephotodepositionofsno2andin2o3thinfilms AT tejosm evaluationofbdiketonatetinandindiumcomplexesasprecursorsforthephotodepositionofsno2andin2o3thinfilms AT hillrh evaluationofbdiketonatetinandindiumcomplexesasprecursorsforthephotodepositionofsno2andin2o3thinfilms
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EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMS

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