InGaAs Junctionless FinFETs With Self-Aligned Ni-InGaAs S/D

by Po-Chun Chang, Chih-Jen Hsiao, Franky Juanda Lumbantoruan, Chia-Hsun Wu, Yen-Ku Lin, Yueh-Chin Lin, Simon M. Sze, Edward Yi Chang
Published 2018