Time-of-flight secondary ion mass spectrometry fragment regularity in gallium-doped zinc oxide thin films
Abstract Time-of-flight secondary ion mass spectrometry fragment analysis remains a challenging task. The fragment appearance regularity (FAR) rule is particularly useful for two-element compounds such as ZnO. Ion fragments appearing in the form of Zn x O y obey the rule $$2x \ge 2y + 1$$ 2 x ≥ 2 y...
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| Main Authors: | , |
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| Format: | article |
| Language: | EN |
| Published: |
Nature Portfolio
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/026519b2eb044c288c5eb4f709df11ee |
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