Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

Subwavelength grating (SWG) metamaterials have garnered a great interest for their singular capability to shape the material properties and the propagation of light, allowing the realization of devices with unprecedented performance. However, practical SWG implementations are limited by fabrication...

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Bibliographic Details
Main Authors: Vladyslav Vakarin, Daniele Melati, Thi Thuy Duong Dinh, Xavier Le Roux, Warren Kut King Kan, Cécilia Dupré, Bertrand Szelag, Stéphane Monfray, Frédéric Boeuf, Pavel Cheben, Eric Cassan, Delphine Marris-Morini, Laurent Vivien, Carlos Alberto Alonso-Ramos
Format: article
Language:EN
Published: MDPI AG 2021
Subjects:
subwavelength grating
metamaterial
silicon photonics
multi-mode interference coupler
beam splitter
Chemistry
QD1-999
Online Access:https://doaj.org/article/1381e63113ea465e9bb395f266d5e229
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https://doaj.org/article/1381e63113ea465e9bb395f266d5e229

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