Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

Subwavelength grating (SWG) metamaterials have garnered a great interest for their singular capability to shape the material properties and the propagation of light, allowing the realization of devices with unprecedented performance. However, practical SWG implementations are limited by fabrication...

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Autores principales:	Vladyslav Vakarin, Daniele Melati, Thi Thuy Duong Dinh, Xavier Le Roux, Warren Kut King Kan, Cécilia Dupré, Bertrand Szelag, Stéphane Monfray, Frédéric Boeuf, Pavel Cheben, Eric Cassan, Delphine Marris-Morini, Laurent Vivien, Carlos Alberto Alonso-Ramos
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	subwavelength grating metamaterial silicon photonics multi-mode interference coupler beam splitter Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/1381e63113ea465e9bb395f266d5e229
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Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

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