A thermomechanical description of the mold filling process in roll-to-roll nanoimprinting lithography
We derive the constitutive equations for a viscoelastic fluid that is undergoing a continuous mold filling process at the nanoscale within the context of a thermomechanical framework. The governing equations are obtained by substituting the constitutive equations into the appropriate balance laws. F...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
Elsevier
2020
|
| Subjects: | |
| Online Access: | https://doaj.org/article/4eaa0b682f6048b2a087072fdd06bd0a |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!