Evaluation of the machine learning classifier in wafer defects classification
In this paper, an evaluation of machine learning classifiers to be applied in wafer defect detection is described. The objective is to establish the best machine learning classifier for Wafer Defect Detection application. k-Nearest Neighbours (k-NN), Logistic Regression, Stochastic Gradient Descent,...
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| Auteurs principaux: | , , , , |
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| Format: | article |
| Langue: | EN |
| Publié: |
Elsevier
2021
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| Sujets: | |
| Accès en ligne: | https://doaj.org/article/567f65f56f124228831b6f31d2f5757e |
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