Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation

In this work, we analysed the difference between the measurement and simulation results of thermal drift of a custom designed capacitive MEMS accelerometer. It was manufactured in X-FAB XMB10 technology together with a dedicated readout circuit in X-FAB XP018 technology. It turned out that the tempe...

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Autores principales: Mariusz Jankowski, Piotr Zając, Piotr Amrozik, Michał Szermer, Cezary Maj, Grzegorz Jabłoński, Jacek Nazdrowicz
Formato: article
Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/8d4d9a375e964554b3e96831bf582f3b
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