Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation

In this work, we analysed the difference between the measurement and simulation results of thermal drift of a custom designed capacitive MEMS accelerometer. It was manufactured in X-FAB XMB10 technology together with a dedicated readout circuit in X-FAB XP018 technology. It turned out that the tempe...

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Autores principales:	Mariusz Jankowski, Piotr Zając, Piotr Amrozik, Michał Szermer, Cezary Maj, Grzegorz Jabłoński, Jacek Nazdrowicz
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	MEMS accelerometer capacitive sensor integrated readout circuit temperature drift thermal measurements Technology T
Acceso en línea:	https://doaj.org/article/8d4d9a375e964554b3e96831bf582f3b
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spelling	oai:doaj.org-article:8d4d9a375e964554b3e96831bf582f3b2021-11-25T17:25:44ZThermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation10.3390/en142274621996-1073https://doaj.org/article/8d4d9a375e964554b3e96831bf582f3b2021-11-01T00:00:00Zhttps://www.mdpi.com/1996-1073/14/22/7462https://doaj.org/toc/1996-1073In this work, we analysed the difference between the measurement and simulation results of thermal drift of a custom designed capacitive MEMS accelerometer. It was manufactured in X-FAB XMB10 technology together with a dedicated readout circuit in X-FAB XP018 technology. It turned out that the temperature sensitivity of the sensor’s output is nonlinear and particularly strong in the negative Celsius temperature range. It was found that the temperature drift is mainly caused by the MEMS sensor and the influence of the readout circuit is minimal. Moreover, the measurements showed that this temperature dependence is the same regardless of applied acceleration. Simulation of the accelerometer’s model allowed us to estimate the contribution of post-manufacturing mismatch on the thermal drift; for our sensor, the mismatch-induced drift accounted for about 6% of total thermal drift. It is argued that the remaining 94% of the drift could be a result of the presence of residual stress in the structure after fabrication.Mariusz JankowskiPiotr ZającPiotr AmrozikMichał SzermerCezary MajGrzegorz JabłońskiJacek NazdrowiczMDPI AGarticleMEMS accelerometercapacitive sensorintegrated readout circuittemperature driftthermal measurementsTechnologyTENEnergies, Vol 14, Iss 7462, p 7462 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	MEMS accelerometer capacitive sensor integrated readout circuit temperature drift thermal measurements Technology T
spellingShingle	MEMS accelerometer capacitive sensor integrated readout circuit temperature drift thermal measurements Technology T Mariusz Jankowski Piotr Zając Piotr Amrozik Michał Szermer Cezary Maj Grzegorz Jabłoński Jacek Nazdrowicz Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation
description	In this work, we analysed the difference between the measurement and simulation results of thermal drift of a custom designed capacitive MEMS accelerometer. It was manufactured in X-FAB XMB10 technology together with a dedicated readout circuit in X-FAB XP018 technology. It turned out that the temperature sensitivity of the sensor’s output is nonlinear and particularly strong in the negative Celsius temperature range. It was found that the temperature drift is mainly caused by the MEMS sensor and the influence of the readout circuit is minimal. Moreover, the measurements showed that this temperature dependence is the same regardless of applied acceleration. Simulation of the accelerometer’s model allowed us to estimate the contribution of post-manufacturing mismatch on the thermal drift; for our sensor, the mismatch-induced drift accounted for about 6% of total thermal drift. It is argued that the remaining 94% of the drift could be a result of the presence of residual stress in the structure after fabrication.
format	article
author	Mariusz Jankowski Piotr Zając Piotr Amrozik Michał Szermer Cezary Maj Grzegorz Jabłoński Jacek Nazdrowicz
author_facet	Mariusz Jankowski Piotr Zając Piotr Amrozik Michał Szermer Cezary Maj Grzegorz Jabłoński Jacek Nazdrowicz
author_sort	Mariusz Jankowski
title	Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation
title_short	Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation
title_full	Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation
title_fullStr	Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation
title_full_unstemmed	Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation
title_sort	thermal performance of a capacitive comb-drive mems accelerometer: measurements vs. simulation
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/8d4d9a375e964554b3e96831bf582f3b
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Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation

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