Flow analysis of a front opening unified pod (FOUP) subjected to different fan filter unit (FFU) coverage area in mini-environment
Moisture contamination control has been adopted in many wafer handling and storage processes. In portable wafer carriers called front opening unified pods (FOUPs), the current industry-accepted methods of moisture control are gas purging and laminar air curtain (LAC). Both typically use purified cle...
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| Autores principales: | , , , , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Elsevier
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/ee5902635e2a4388823d002dd38d4378 |
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