EVALUATION OF b-DIKETONATE TIN AND INDIUM COMPLEXES AS PRECURSORS FOR THE PHOTODEPOSITION OF SnO2 AND In2O3 THIN FILMS
SnO2 and In2O3 thin films have been succesfully prepared by direct UV irradiation of amorphous films of b-diketonate complexes on Si(100) substrates. The as-deposited films were analyzed by Auger electron spectroscopy (AES), whereas annealing was required in order to get X-ray diffraction spectra, i...
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| Main Authors: | , , , , |
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| Language: | English |
| Published: |
Sociedad Chilena de Química
2005
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| Subjects: | |
| Online Access: | http://www.scielo.cl/scielo.php?script=sci_arttext&pid=S0717-97072005000300003 |
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