Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics

by X. Chen, F. Meng, S. A. Fortune, A. J. Compston, M. Ebert, X. Yan, H. Du, M. Banakar, D. T. Tran, C. G. Littlejohns, D. J. Thomson, R. Nicolaescu, G. T. Reed
Published 2021