Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics

por X. Chen, F. Meng, S. A. Fortune, A. J. Compston, M. Ebert, X. Yan, H. Du, M. Banakar, D. T. Tran, C. G. Littlejohns, D. J. Thomson, R. Nicolaescu, G. T. Reed
Publicado 2021