Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics

Solid state beam steering devices are key elements in low cost, robust, and three-dimensional imaging systems. Here, we present a silicon photonic beam steering device based upon an 8 × 8 grating coupler focal plane array approach fed by a thermo-optic Mach–Zehnder switching tree. In this device, tr...

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Autores principales:	X. Chen, F. Meng, S. A. Fortune, A. J. Compston, M. Ebert, X. Yan, H. Du, M. Banakar, D. T. Tran, C. G. Littlejohns, D. J. Thomson, R. Nicolaescu, G. T. Reed
Formato:	article
Lenguaje:	EN
Publicado:	AIP Publishing LLC 2021
Materias:	Applied optics. Photonics TA1501-1820
Acceso en línea:	https://doaj.org/article/4e37c53029124e4faf55312f21fe88e7
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spelling	oai:doaj.org-article:4e37c53029124e4faf55312f21fe88e72021-12-01T18:51:32ZSilicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics2378-096710.1063/5.0065210https://doaj.org/article/4e37c53029124e4faf55312f21fe88e72021-11-01T00:00:00Zhttp://dx.doi.org/10.1063/5.0065210https://doaj.org/toc/2378-0967Solid state beam steering devices are key elements in low cost, robust, and three-dimensional imaging systems. Here, we present a silicon photonic beam steering device based upon an 8 × 8 grating coupler focal plane array approach fed by a thermo-optic Mach–Zehnder switching tree. In this device, transmission of light from the grating couplers is made through the backside of the chip using topside mirrors allowing for both high-efficiency out-coupling and direct flip-chip integration of drive electronics, providing a path to scale to denser focal plane arrays with large numbers of points in the future. A −13.8 dB fiber-to-fiber transmission was achieved in our preliminary test around 1523 nm for the beam steering chip.X. ChenF. MengS. A. FortuneA. J. CompstonM. EbertX. YanH. DuM. BanakarD. T. TranC. G. LittlejohnsD. J. ThomsonR. NicolaescuG. T. ReedAIP Publishing LLCarticleApplied optics. PhotonicsTA1501-1820ENAPL Photonics, Vol 6, Iss 11, Pp 116106-116106-7 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Applied optics. Photonics TA1501-1820
spellingShingle	Applied optics. Photonics TA1501-1820 X. Chen F. Meng S. A. Fortune A. J. Compston M. Ebert X. Yan H. Du M. Banakar D. T. Tran C. G. Littlejohns D. J. Thomson R. Nicolaescu G. T. Reed Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics
description	Solid state beam steering devices are key elements in low cost, robust, and three-dimensional imaging systems. Here, we present a silicon photonic beam steering device based upon an 8 × 8 grating coupler focal plane array approach fed by a thermo-optic Mach–Zehnder switching tree. In this device, transmission of light from the grating couplers is made through the backside of the chip using topside mirrors allowing for both high-efficiency out-coupling and direct flip-chip integration of drive electronics, providing a path to scale to denser focal plane arrays with large numbers of points in the future. A −13.8 dB fiber-to-fiber transmission was achieved in our preliminary test around 1523 nm for the beam steering chip.
format	article
author	X. Chen F. Meng S. A. Fortune A. J. Compston M. Ebert X. Yan H. Du M. Banakar D. T. Tran C. G. Littlejohns D. J. Thomson R. Nicolaescu G. T. Reed
author_facet	X. Chen F. Meng S. A. Fortune A. J. Compston M. Ebert X. Yan H. Du M. Banakar D. T. Tran C. G. Littlejohns D. J. Thomson R. Nicolaescu G. T. Reed
author_sort	X. Chen
title	Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics
title_short	Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics
title_full	Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics
title_fullStr	Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics
title_full_unstemmed	Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics
title_sort	silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics
publisher	AIP Publishing LLC
publishDate	2021
url	https://doaj.org/article/4e37c53029124e4faf55312f21fe88e7
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Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics

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