Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics
Solid state beam steering devices are key elements in low cost, robust, and three-dimensional imaging systems. Here, we present a silicon photonic beam steering device based upon an 8 × 8 grating coupler focal plane array approach fed by a thermo-optic Mach–Zehnder switching tree. In this device, tr...
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| Main Authors: | , , , , , , , , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
AIP Publishing LLC
2021
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| Subjects: | |
| Online Access: | https://doaj.org/article/4e37c53029124e4faf55312f21fe88e7 |
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